Relation Between Oxidation Rate and Oxidation-Induced...

Japanese Journal of Applied Physics 2013 / 11 Vol. 52; Iss. 11R

Relation Between Oxidation Rate and Oxidation-Induced Strain at SiO 2 /Si(001) Interfaces during Thermal Oxidation

Ogawa, Shuichi, Tang, Jiayi, Yoshigoe, Akitaka, Ishidzuka, Shinji, Teraoka, Yuden, Takakuwa, Yuji
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.110128
Date:
November, 2013
File:
PDF, 289 KB
english, 2013
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