SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Loop closure theory in deriving linear and simple kinematic model for a 3-DOF parallel micromanipulator
Yong, Yuen Kuan, Lu, Tien-Fu, Handley, Daniel C., Chiao, Jung-Chih, Hariz, Alex J., Jamieson, David N., Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Year:
2004
Language:
english
DOI:
10.1117/12.522258
File:
PDF, 396 KB
english, 2004