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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII - Packaging of a silicon-based biochip
Velten, Thomas, Biehl, Margit, Haberer, Werner, Koch, Timo, Ortiz, Pedro, Keegan, Neil, Spoors, Julia, Hedley, John, McNeil, Calum, Kullberg, Richard C., Ramesham, RajeshuniVolume:
7206
Year:
2009
Language:
english
DOI:
10.1117/12.813500
File:
PDF, 2.63 MB
english, 2009