SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II - Improvement in total measurement uncertainty for gate CD control
Bunday, Benjamin D., Sorkhabi, Osman, Wen, Youxian, Paranjpe, Ajit, Terbeek, Paul, Allgair, John, Peterson, Amy, Duparr½Á, Angela, Singh, Bhanwar, Gu, Zu-HanVolume:
5878
Year:
2005
Language:
english
DOI:
10.1117/12.616344
File:
PDF, 536 KB
english, 2005