Rf discharge dissociative mode in NF 3...

Journal of Physics D Applied Physics 2007 / 11 Vol. 40; Iss. 21

Rf discharge dissociative mode in NF 3 and SiH 4

Lisovskiy, V, Booth, J-P, Landry, K, Douai, D, Cassagne, V, Yegorenkov, V
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/21/023
Date:
November, 2007
File:
PDF, 1.48 MB
english, 2007
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