SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, United States (Tuesday 16 September 2014)] Photomask Technology 2014 - Increasing reticle inspection efficiency and reducing wafer printchecks at 14nm using automated defect classification and simulation
Ackmann, Paul W., Hayashi, Naoya, Paracha, Shazad, Goodman, Eliot, Eynon, Benjamin G., Noyes, Ben F., Ha, Steven, Kim, Jong-Min, Lee, Dong-Seok, Lee, Dong-Heok, Cho, Sang-Soo, Ham, Young M., Vacca, AnVolume:
9235
Year:
2014
Language:
english
DOI:
10.1117/12.2070256
File:
PDF, 922 KB
english, 2014