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SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating
Koll, Andreas, Kummer, Adrian, Brand, Oliver, Baltes, Henry, Varadan, Vijay K.Volume:
3673
Year:
1999
Language:
english
DOI:
10.1117/12.354283
File:
PDF, 1.42 MB
english, 1999