Optimization of UHV-CVD Thin Films for Gate Dielectric...

Advances in Science and Technology 2006 Vol. 45

Optimization of UHV-CVD Thin Films for Gate Dielectric Applications

Rogers, Bridget R., Song, Zhe, Geil, Robert D., Weller, Robert A.
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Volume:
45
Year:
2006
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/AST.45.1351
File:
PDF, 338 KB
english, 2006
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