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Effect of Shot Number on Femtosecond Laser Drilling of Silicon
Laakso, P.Volume:
5
Language:
english
Journal:
Journal of Laser Micro/Nanoengineering
DOI:
10.2961/jlmn.2010.03.0017
Date:
December, 2010
File:
PDF, 585 KB
english, 2010