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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California (Sunday 21 August 2011)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V - Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution
Papadakis, Vassilis, Everest, Michael A., Stamataki, Katerina, Tzortzakis, Stelios, Loppinet, Benoit, Rakitzis, T. Peter, Postek, Michael T.Volume:
8105
Year:
2011
Language:
english
DOI:
10.1117/12.903053
File:
PDF, 612 KB
english, 2011