Charge-sensitive deep level transient spectroscopy of...

Charge-sensitive deep level transient spectroscopy of helium-ion-irradiated silicon, as-irradiated and after thermal annealing

Bing-Sheng, Li, Chong-Hong, Zhang, Yi-Tao, Yang, Li-Hong, Zhou, Hong-Hua, Zhang
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Volume:
18
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/18/1/040
Date:
January, 2009
File:
PDF, 610 KB
english, 2009
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