Charge-sensitive deep level transient spectroscopy of helium-ion-irradiated silicon, as-irradiated and after thermal annealing
Bing-Sheng, Li, Chong-Hong, Zhang, Yi-Tao, Yang, Li-Hong, Zhou, Hong-Hua, ZhangVolume:
18
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/18/1/040
Date:
January, 2009
File:
PDF, 610 KB
english, 2009