Effect of Ar Ion Beam Pre-Treatment of Poly(ethylene terephthalate) Substrate on the Mechanical and Electrical Stability of Flexible InSnO Films Grown by Roll-to-Roll Sputtering System
Choi, Kwang-Hyuk, Kim, Han-KiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.10MA14
Date:
October, 2013
File:
PDF, 159 KB
english, 2013