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SPIE Proceedings [SPIE Defense and Security - Orlando, FL (Monday 28 March 2005)] Spaceborne Sensors II - Liquid crystal polymer based MEMS capacitive pressure sensor
Palasagaram, Jithendra N., Ramadoss, Ramesh, Tchoryk, Jr., Peter, Holz, BrianVolume:
5798
Year:
2005
Language:
english
DOI:
10.1117/12.606642
File:
PDF, 267 KB
english, 2005