Silicon-on-nothing MOSFETs fabricated with hydrogen and...

Chinese Physics 2006 / 11 Vol. 15; Iss. 11

Silicon-on-nothing MOSFETs fabricated with hydrogen and helium co-implantation

Wei-Hai, Bu, Ru, Huang, Ming, Li, Yu, Tian, Da-Ke, Wu, Man-Sun, Chan, Yang-Yuan, Wang
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Volume:
15
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/15/11/049
Date:
November, 2006
File:
PDF, 1.25 MB
english, 2006
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