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Dry Etching of PZT Thin Films for Bilayer Actuator Realization
Soyer, C., Fribourg-Blanc, E., Cattan, E., R�miens, D.Volume:
69
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580490898703
Date:
February, 2005
File:
PDF, 2.17 MB
english, 2005