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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Nanophotonic Materials IX - The effectiveness of metal oxide nanocrystal-enhanced polymers as hardmasks for photolithography
Hockey, Mary Ann, Lin, Qin, Calderas, Eric, Cabrini, Stefano, Mokari, TalebVolume:
8456
Year:
2012
Language:
english
DOI:
10.1117/12.928964
File:
PDF, 3.50 MB
english, 2012