SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Fabrication and testing of Wolter type-I mirrors for soft x-ray microscopes
Hoshino, Masato, Aoki, Sadao, Watanabe, Norio, Hirai, Shinichiro, Khounsary, Ali M., Dinger, Udo, Ota, KazuyaVolume:
5533
Year:
2004
Language:
english
DOI:
10.1117/12.557617
File:
PDF, 197 KB
english, 2004