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Effect of Etch Mask and Etching Solution on InP Micromachining to Form V-Grooves
Kuna V. S. R., Kishore, Vangala, Naveen Kumar, DasGupta, Amitava, DasGupta, NanditaVolume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1357177
File:
PDF, 351 KB
english, 2001