Aerial image back propagation with two-dimensional...

Aerial image back propagation with two-dimensional transmission cross coefficient

Yamazoe, Kenji
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Volume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3206980
Date:
July, 2009
File:
PDF, 650 KB
english, 2009
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