Deep sub-micron stud-via technology of superconductor VLSI...

Superconductor Science and Technology 2014 / 02 Vol. 27; Iss. 2

Deep sub-micron stud-via technology of superconductor VLSI circuits

Tolpygo, Sergey K, Bolkhovsky, V, Weir, T, Johnson, L M, Oliver, W D, Gouker, M A
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Volume:
27
Language:
english
Journal:
Superconductor Science and Technology
DOI:
10.1088/0953-2048/27/2/025016
Date:
February, 2014
File:
PDF, 38 KB
english, 2014
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