High Aspect Ratio Microstructures in LiNbO3 Produced by Ion...

MRS Proceedings 2005 / 1 Vol. 908

High Aspect Ratio Microstructures in LiNbO3 Produced by Ion Beam Enhanced Etching

Schrempel, Frank, Gischkat, Thomas, Hartung, Holger, Kley, Ernst Bernhard, Wesch, Werner, Tünnermann, Andreas
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Volume:
908
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0908-OO16-01
Date:
January, 2005
File:
PDF, 207 KB
english, 2005
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