SPIE Proceedings [SPIE Eighth International Conference on Thin Film Physics and Applications (TFPA13) - Shanghai, China (Friday 20 September 2013)] Eighth International Conference on Thin Film Physics and Applications - An investigation of passivation properties of SiN x -Si interface by an MIS model
Wang, Jun, Han, Meijie, Ma, Xueliang, Zhang, Hua, Chen, Ping, Zhu, Haixin, Chu, Junhao, Wang, ChunruiVolume:
9068
Year:
2013
Language:
english
DOI:
10.1117/12.2053225
File:
PDF, 350 KB
english, 2013