SPIE Proceedings [SPIE Intelligent Systems and Smart Manufacturing - Boston, MA (Sunday 5 November 2000)] Microrobotics and Microassembly II - LIGA technology today and its industrial applications
Chung, Song-Jo, Hein, Herbert, Mohr, Juergen, Pantenburg, Franz J., Schulz, Joachim, Wallrabe, Ulrike, Nelson, Bradley J., Breguet, Jean-MarcVolume:
4194
Year:
2000
Language:
english
DOI:
10.1117/12.403702
File:
PDF, 1.57 MB
english, 2000