Electron beam treatment of non-conducting materials by a fore-pump-pressure plasma-cathode electron beam source
Burdovitsin, V A, Klimov, A S, Medovnik, A V, Oks, E MVolume:
19
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/19/5/055003
Date:
October, 2010
File:
PDF, 663 KB
english, 2010