Effects of high temperature rapid thermal annealing on Ge...

Chinese Physics B 2013 / 11 Vol. 22; Iss. 11

Effects of high temperature rapid thermal annealing on Ge films grown on Si(001) substrate

Liu, Zhi, Cheng, Bu-Wen, Li, Ya-Ming, Li, Chuan-Bo, Xue, Chun-Lai, Wang, Qi-Ming
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Volume:
22
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/22/11/116804
Date:
November, 2013
File:
PDF, 593 KB
english, 2013
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