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Uniaxially Strained Silicon on Insulator with Wafer Level Prepared by Mechanical Bending and Annealing
Dai, XianYing, Shao, ChenFeng, Hao, YueVolume:
6
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.6.081302
Date:
August, 2013
File:
PDF, 1.98 MB
english, 2013