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SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology
Cui, Feng, Chen, Wenyuan, Su, Yufeng, Zhang, Weiping, Zhao, Xiaolin, Ma, Zhichun, Jin, Guofan, Chen, XuyuanVolume:
5641
Year:
2004
Language:
english
DOI:
10.1117/12.575632
File:
PDF, 277 KB
english, 2004