Deposition of Polymer Thin Film Using an Atmospheric...

Plasma Science and Technology 2014 / 01 Vol. 16; Iss. 1

Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation

Wang, Xiaomin, Yuan, Qianghua, Zhou, Yongjie, Yin, Guiqin, Dong, Chenzhong
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Volume:
16
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/16/1/15
Date:
January, 2014
File:
PDF, 436 KB
english, 2014
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