Effect of electron energy distribution function on power...

Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Ramamurthi, Badri, Economou, Demetre J, Kaganovich, Igor D
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/3/302
Date:
August, 2003
File:
PDF, 367 KB
english, 2003
Conversion to is in progress
Conversion to is failed