![](/img/cover-not-exists.png)
Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures
Ramamurthi, Badri, Economou, Demetre J, Kaganovich, Igor DVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/3/302
Date:
August, 2003
File:
PDF, 367 KB
english, 2003