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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Advances in multilayer reflective coatings for extreme ultraviolet lithography
Folta, James A., Bajt, Sasa, Barbee, Jr., Troy W., Grabner, R. Fred, Mirkarimi, Paul B., Nguyen, Tai D., Schmidt, Mark A., Spiller, Eberhard A., Walton, Christopher C., Wedowski, Marco, Montcalm, ClauVolume:
3676
Year:
1999
Language:
english
DOI:
10.1117/12.351156
File:
PDF, 443 KB
english, 1999