Micromachining of Novel SiC on Si Structures for Device and...

Materials Science Forum 2006 Vol. 527-529

Micromachining of Novel SiC on Si Structures for Device and Sensor Applications

Förster, Christian, Cimalla, Volker, Stubenrauch, M., Rockstuhl, Carsten, Brückner, Klemens, Hein, Matthias A., Pezoldt, Jörg, Ambacher, Oliver
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.1111
File:
PDF, 1.60 MB
english, 2006
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