Fluidic assembly of hybrid MEMS: a GaAs-based...

Journal of Micromechanics and Microengineering 2010 / 12 Vol. 20; Iss. 12

Fluidic assembly of hybrid MEMS: a GaAs-based microcantilever spin injector

Arscott, Steve, Peytavit, Emilien, Vu, Duong, Rowe, Alistair C H, Paget, Daniel
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/12/129803
Date:
December, 2010
File:
PDF, 118 KB
english, 2010
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