Sputtered SiO2 Induced Atomic Interdiffusion in...

Advanced Materials Research 2008 Vol. 31

Sputtered SiO2 Induced Atomic Interdiffusion in Semiconductor Nano Heterostructures

Hongpinyo, V., Ding, Y.H., Anderson, J., Djie, Hery S., Ooi, Boon S., Du, R.R., Ganjoo, A., Jain, H.
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Volume:
31
Year:
2008
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.31.33
File:
PDF, 620 KB
english, 2008
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