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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Micromachining and Microfabrication Process Technology XIX - Fabrication of microelectromechanical systems (MEMS) cantilevers for photoacoustic (PA) detection of terahertz (THz) radiation
Maher, Mary Ann, Resnick, Paul J., Newberry, R., Glauvitz, N., Coutu, R. A., Medvedev, I. R., Petkie, D.Volume:
8973
Year:
2014
Language:
english
DOI:
10.1117/12.2037376
File:
PDF, 430 KB
english, 2014