Comprehensive Solution for Ultrathin Oxide Reliability...

Japanese Journal of Applied Physics 2006 / 1 Vol. 45; Iss. 1A

Comprehensive Solution for Ultrathin Oxide Reliability Projections Including Novel Explanation for Power-Law Exponent Variations

Shieh, Jerry, Lin, Cheng-Li, Kang, Ting-Kuo, Lo, Oswin, Chen, Ju-Ping, Su, K. C.
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.79
Date:
January, 2006
File:
PDF, 533 KB
english, 2006
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