Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
Kobayashi, Takeshi, Tsaur, Jiunnjye, Ichiki, Masaaki, Maeda, RyutaroVolume:
301
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.301.37
File:
PDF, 425 KB
english, 2006