SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Laser Beam Control and Applications - High power and short pulse RF-excited CO2 laser MOPA system for LLP EUV light source
Ariga, Tatsuya, Hoshino, Hideo, Miura, Taisuke, Endo, Akira, Kudryashov, Alexis V., Paxton, Alan H., Ilchenko, Vladimir S., Giesen, Adolf, Nickel, Detlef, Davis, Steven J., Heaven, Michael C., SchriemVolume:
6101
Year:
2006
Language:
english
DOI:
10.1117/12.645607
File:
PDF, 636 KB
english, 2006