Characterization of K+ and Na+-Sensitive Membrane...

Characterization of K+ and Na+-Sensitive Membrane Fabricated by CF4 Plasma Treatment on Hafnium Oxide Thin Films on ISFET

Lu, Tseng-Fu, Yang, Chia-Ming, Wang, Jer-Chyi, Ho, Kuan-I, Chin, Chi-Hung, Pijanowska, Dorota G., Jaroszewicz, Bohdan, Lai, Chao-Sung
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3543922
File:
PDF, 1.59 MB
english, 2011
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