Micromachined force sensors using thin film nickel–chromium...

Journal of Micromechanics and Microengineering 2012 / 06 Vol. 22; Iss. 6

Micromachined force sensors using thin film nickel–chromium piezoresistors

Nadvi, Gaviraj S, Butler, Donald P, Çelik-Butler, Zeynep, Gönenli, İsmail Erkin
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Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/6/065002
Date:
June, 2012
File:
PDF, 535 KB
english, 2012
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