SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Preliminary results on x-ray lithography using a compact plasma focus
Lee, Sing, Feng, X., Zhang, Guan, Lee, Paul C. K., Liu, Mahe, Serban, Adrian, Springham, Stuart V., Wong, Terence K. S., Wira, K., Selvam, C., Thang, A., Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.Volume:
3183
Year:
1997
DOI:
10.1117/12.280532
File:
PDF, 643 KB
1997