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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - Modification of cantilevers for atomic-force microscopy using the method of exposure defocused ion beam
Orlikovsky, Alexander A., Antonov, S. P., Krasnoborodko, S. Yu., Smagulova, S. A., Chaplygin, Y. A., Shevyakov, V. I.Volume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2179243
File:
PDF, 1.13 MB
english, 2014