A high-efficiency approach for fabricating mass micro holes...

A high-efficiency approach for fabricating mass micro holes by batch micro EDM

Chen, Shun-Tong
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/006
Date:
October, 2007
File:
PDF, 5.01 MB
english, 2007
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