Heteroepitaxial TiN of Very Low Mosaic Spread on Al...

Japanese Journal of Applied Physics 2003 / 1 Vol. 42; Iss. Part 1, No

Heteroepitaxial TiN of Very Low Mosaic Spread on Al 2 O 3

Chen, Wei-Chuan, Lin, Yan-Ru, Guo, Xing-Jian, Wu, Shinn-Tyan
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.208
Date:
January, 2003
File:
PDF, 813 KB
english, 2003
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