Vertical electrothermal actuator with separated metal and nitride structural layers
Tsai, Jui-cheVolume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3100208
Date:
April, 2009
File:
PDF, 1.45 MB
english, 2009