SPIE Proceedings [SPIE Optical Science and Technology, the...

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SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Optical Constants of Materials for UV to X-Ray Wavelengths - High-accuracy VUV reflectometry at selectable sample temperatures

Gottwald, Alexander, Kroth, Udo, Letz, Martin, Schoppe, Hendrik, Richter, Mathias, Soufli, Regina, Seely, John F.
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Volume:
5538
Year:
2004
Language:
english
DOI:
10.1117/12.556301
File:
PDF, 120 KB
english, 2004
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