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Parameters Measurement of ECR Silane Plasma
Morimoto, Michikazu, Ueda, Yoko, Hiejima, Shinya, Katsumata, Itsuo, Kawai, YoshinobuVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4659
Date:
July, 1997
File:
PDF, 828 KB
1997