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Microstructure and Mechanical Characteristics of the CrN/Si3N4 Multilayered Films Prepared by Sputtering
Liu, Chien Cheng, Liu, Kuang I, Lin, Hao Tung, Cheng, Yung MaoVolume:
476-478
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.476-478.2571
Date:
February, 2012
File:
PDF, 718 KB
english, 2012