SPIE Proceedings [SPIE SPIE Micro+Nano Materials, Devices,...

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SPIE Proceedings [SPIE SPIE Micro+Nano Materials, Devices, and Applications - Melbourne, Victoria, Australia (Sunday 8 December 2013)] Micro/Nano Materials, Devices, and Systems - Nanoimprint lithography for microfluidics manufacturing

Friend, James, Tan, H. Hoe, Kreindl, Gerald, Matthias, Thorsten
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Volume:
8923
Year:
2013
Language:
english
DOI:
10.1117/12.2035609
File:
PDF, 5.88 MB
english, 2013
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