Simulation of Dual Frequency Capacitive Sheath over a...

Simulation of Dual Frequency Capacitive Sheath over a Concave Electrode in Low Pressure

Mei-Lan, Hao, Zhong-Ling, Dai, You-Nian, Wang
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Volume:
26
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/26/12/125202
Date:
December, 2009
File:
PDF, 155 KB
english, 2009
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