Simulation of Dual Frequency Capacitive Sheath over a Concave Electrode in Low Pressure
Mei-Lan, Hao, Zhong-Ling, Dai, You-Nian, WangVolume:
26
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/26/12/125202
Date:
December, 2009
File:
PDF, 155 KB
english, 2009