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SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Melt expulsion by a coaxial gas jet in trepanning of CMSX-4 with microsecond Nd:YAG laser radiation
Willach, Jens, Kreutz, Ernst W., Michel, Jan, Niessen, Markus, Schulz, Wolfgang, Poprawe, Reinhart, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.540753
File:
PDF, 699 KB
english, 2003